摘要
首先综述了我国半导体产业近年发展概况,然后论述了特气相关行业的配套发展问题,同时也介绍了世界及我国知名气体企业的应对措施。
Summarized recent developments of the semiconductor industry in China, and then expounded the supporting measures for the specialty gases industry. Also introduced the reply measures of the well-known gas enterprise in the world and our country.
出处
《低温与特气》
CAS
2009年第1期4-8,共5页
Low Temperature and Specialty Gases