低压化学气相沉积技术制备锗反蛋白石三维光子晶体

Fabrication of Germanium Inverse Opal Three-dimensional Photonic Crystal by LPCVD

采用溶剂蒸发对流自组装法将单分散SiO2微球组装形成三维有序胶体晶体模板,用低压化学气相沉积法填充高折射率材料锗,酸洗去除SiO2模板,获得了锗反蛋白石三维光子晶体.通过扫描电镜、X射线衍射仪和紫外-可见-近红外光谱仪对锗反蛋白石的形貌、成分、结构和光学性能进行了表征.结果表明:锗在SiO2微球空隙内具有较高的结晶质量,填充致密均匀.通过改变沉积工艺,可控制锗的填充率;制备的锗反蛋白三维光子晶体具有明显的光学反射峰,表现出光学带隙效应.测试的光学性能与理论计算基本吻合.

Monodisperse silica microspheres were assembled into three-dimensional colloidal crystal template with long-ranged order by solvent vaporization convection self-assembly method. Low Pressure Chemical Vapour Deposition（LPCVD） method was used to fill the voids of silica colloidal crystals template with high refractive index material germanium, then silica colloidal crystals template was removed by an acid etching. Thus germanium three-dimensional inverse opal photonic crystal was obtained. The modality,component and structure of the resulted samples were characterized by scanning electron microscopy, X-ray diffraction and UV-VIS-NIR spectroscopy. Results show that germanium of high crystalline quality is homogeneously distributed inside the voids of silica template. The filling fraction of germanium can be controlled by changing the conditions of LPCVD. The samples have optic reflective apex and show the photonic band gap effects. The experiment optic capability is inosculated with the calculated one.