深紫外波段光学薄膜研究进展

Research Progress of Deep-Ultraviolet Optical Coatings

随着准分子激光、自由电子激光以及全固态深紫外激光等深紫外激光光源的推广应用,近年来,深紫外波段光学薄膜技术得到了快速的发展。综述了深紫外波段增强型铝镜、氧化物薄膜、氟化物薄膜以及氧化物和氟化物的混合薄膜的最新研究进展。

With the development of deep-ultraviolet （DUV） light sources, especially the excimer lasers, free-electron lasers, and solid-state lasers, the performance of DUV optical coatings have been improved rapidly. The recent developments in DUV optical coatings, including DUV-enhanced aluminum mirrors, oxide multilayer coatings, fluoride multilayer coatings, and oxide-fluoride mixing multilayer coatings are summarized.