亚微米尺度高速电光调制器的研究进展

Recent Progress of Sub-micrometer High-speed Electro-optic Modulators

基于SOI(silicon on insulator)材料的亚微米尺度电光调制器成为了研究Si光电子学的重点。评述了亚微米尺度下SOI脊型光波导实现单模条件、偏振无关、低耦合损耗的技术要求,分析并比较了几种基于不同光学结构和电学结构的电光调制器的原理和特性,讨论了达到高速电光调制的方式。

Silicon-on-insulator（SOI）-based sub-micrometer electro-optic modulators become the key point of Si-based optoelectronic researching. In this paper, the techniques requirement to achieve single-mode condition, polarization dependence,low coupling loss in SOl-based sub-micrometer rib waveguide are reviewed. The principle and characteristic of several optoelectronic modulators based on different optic or electric structures is analyzed and compared, respectively. Then, the possible ways to achieve high speed optoelectronic modulation are discussed.