BeO陶瓷的性能、制备及应用

Properties, preparation and application of BeO ceramics

随着现代电子封装技术的迅速发展,对基板材料的性能提出了更高的要求,而高纯BeO陶瓷以其具有高热导率及其它优异性能基本上满足这些要求,但成本高、制备难度大而且存在毒性防护问题。文内阐述了BeO陶瓷的制备及金属化方法,讨论了BeO的毒性和防护措施,并对其在大功率电子器件与集成电路、原子能反应堆、高级耐火材料、光电技术等领域的应用进行评估;指出BeO陶瓷今后的研究重点应为从基础的烧结机理和制备工艺出发,寻找合适的烧结助剂组合,以提高其生产质量并降低生产成本。

With the development of electronic encapsulation technology, higher requirements are proponed for the substrate material, for example the BeO ceramics with high purity. Therefore, the main properties of BeO ceramics especially its high thermal conductivity were introduced; the basic preparation methods of BeO ceramics and its applications in many fields, such as high-power electronic devices and integrated circuits, atomic reactors, high level refractories and optoelectronic technology, were expounded in the present paper. And the protective measures for the toxicity of BeO ceramics, which is existed in the production of BeO, were discussed.