超精密平面磨削的微量进给及其控制研究

Research on microfeed and its control for ultraprecision planegrinding

本文采用压电陶瓷作为控制元件，设计出一种能够对空气轴承实现０．０１μｍ的微量进给装置，并提出了导轨误差的神经网络补偿控制算法。实验结果及仿真研究证明了本文方法的有效性。

By adopting piezoceramics as the controlling element this paper designed a kind of device which can let the airbearing to achieve a 0.01μm microfeed, and put forward an algorithm for guide error compensation control of the neural network.Result of test and study of emulation proved the effectiveness of the method introduced in this paper.