MCM基极电测试技术

Electrical Test Technology of MCM's Substraies

对于复杂的MCM多层互连基板，电测试是控制成本、确保质量的关键环节。本文简要介绍了探针电阻、电容、电子束、潜在开路缺陷电测试及其测试技术的应用。

Fox complex MCM substrates, electrical test is afundamental element of cost control and quality assurance' This paper presents electrical test of MCM substrates which include: probe resistance. capcitance.electron beam. latent open defects and applications ofthe test technologies.