摘要
在不同的甲烷流量下,用热丝化学气相沉积方法(HFCVD)在N型(100)单晶硅片上制备了掺硼金刚石薄膜.用扫描电子显微镜(SEM)和拉曼光谱(Raman)对薄膜检测的结果表明,随着甲烷流量的增加,掺硼金刚石薄膜的二次形核增加,晶粒尺寸减小,晶界变得模糊,结晶性下降,非金刚石相增多,过高的甲烷流量导致掺硼金刚石薄膜的球状生长.
Boron-doped diamond films were prepared using hot filament chemical vapor deposition （HF- CVD） on silicon （100） substrate with different methane flow. The influence of methane flow on borondoped polycrystalline diamond films was investigated by SEM and Raman spectra. It was found that the secondary nucleation of boron-doped polycrystalline diamond films increases with the increasing of methane flow,white the crystallinity presents opposite tendency.
出处
《材料研究与应用》
CAS
2009年第1期28-31,共4页
Materials Research and Application
