三轴压阻式传感器横向效应的研究

Research on transverse effect of three axis piezoresistive accelerometer

研究了霍普金斯杆冲击方法和自由落体冲击方法检测高量程微机械三轴压阻式传感器的横向效应,即分别在x轴、y轴的正向或负向作主轴时,检测三轴压阻式传感器其他2个方向感受到的g值大小和方向。依据结构设计分析应该没有横向效应,然而,在实验的测量中都得出大的横向效应,尤其是在z轴作为横向输出轴时得到较大的横向效应,而x,y轴作为横向输出轴时横向效应相对较小。试验结果表明:一定的主轴输出脉冲方向确定一定的横向输出轴的脉冲方向。

The Hopkinson bar method and free-drop method detected high-range three-axis MEMS sensor＇s transverse effect are studied. Considering positive or negative X-axis, Y-axis as the axial shaft, the acceleration size and direction of the sensor＇s other two axis are detected. Based on analysis of structural design, there is no transverse effect. But large transverse effect is got in the experiment measurement. Especially considering the z-axis as the horizontal output shaft, obvious horizontal effect is obtained. Considering x-axis or y-axis as the horizontal axis, horizontal sensitivity is relatively small. The results show that certain direction of axial shaft＇s output pulse can determin certain direction of horizontal shaft＇s output pulse.