摘要
为了实现微孔喷丝头的多元化截面形状,采用紫外(UV)-LIGA技术和激光焊接的方法,初步探索了UV-LIGA技术在制备异形微喷嘴上的应用。应用UV-LIGA技术电铸出不同孔形的喷丝头底板,并采用激光焊接技术实现底板和冲压外框的整体成型。实验结果表明:以UV-LIGA技术替代LIGA技术加工的喷丝头微孔侧壁光洁,截面形状多样,孔形均一性好,加工成本低廉。
To product diversiform profiles of microfiber spinneret, application of UV-LIGA technique to fabricate profiles of microfiber are preliminarily discussed by UV-LIGA technique and laser welding technology. Spinneret plate is deposited by electrotyping method firstly, then the entire forming of spinneret is realized by using laser welding. The experiment results show that profiled microfiber spinneret has not only smooth surface of profiles, various and uniform section shapes, but also lower cost.
出处
《传感器与微系统》
CSCD
北大核心
2009年第3期58-60,共3页
Transducer and Microsystem Technologies
基金
国家"863"计划资助项目(2006AA04Z308
2006AA04Z326)
