射频磁控反应溅射制备Y_2O_3薄膜沉积分布的研究

Study of Sediment about Y_2O_3 by Radio Frequency Magnetron Reactive Sputtering

金刚石具有高透过率、高热导率、高的化学和热稳定性以及优异的力学性能,是制造高速飞行器红外窗口和头罩的理想材料。然而,在高速飞行时,由于空气动力加热会产生很高的温度,使金刚石迅速发生氧化,导致透过率急剧下降。为此,需要在金刚石表面制备抗氧化增透涂层。本文采用射频磁控反应溅射法制备Y2O3薄膜,观察了薄膜的沉积分布,并通过电磁场理论对沉积分布进行了探讨,结果表明:在腔体内的电场线分布是导致薄膜厚度周期性变化的主要因素。

Diamond has excellent properties such as good transmittance in the infrared wave band, high thermal conductance, high chemical and thermal stability and excellent properties in mechanics. Diamond is an ideal material for airborne windows and domes of high-speed flight aircraft. However, diamond is easily subject to oxidation in air because of ealefaction of air power, and the optical transmittance is hence degraded greatly. So anti-oxidation and anti-reflective films must be prepared on the diamond surface. Y2O3 coatings which were prepared by radio frequency magnetron reactive sputtering were observed, and the distributing of sediment was discussed by the theory of electromagnetism. Results show that the periodicity variety of the thickness resulted from the distributing of the electric field.