有机波导制备工艺对乐甫波传感器性能的影响

Effect of organic guiding layer preparation technique on properties of love wave sensor

研究了基于PMMA波导的乐甫波传感器,研究了器件的插损以及质量灵敏度随波导层厚度变化的关系。采用低浓度、低粘度的前驱溶液,多步旋涂工艺制备了PMMA波导薄膜,降低了器件的插损,实现了2.18μm的'有效厚度',器件的质量灵敏度达705cm2/g,与前人相比提高了1倍。

The SiNO film has been deposited by unbalance magnetron sputttering（UP, MS） on the substrate of Ti6A14V alloy at different N2 gas flow rate. The wear-resistance and anticorrosion properties were studied. The results show that the samples coating with SiNO film have perfect wear-resistance and anticorrosion properties. It is suggested that the N atom content and the compound exist statement significantly affects the properties of the SiNO films.