掺杂Au的ITO介孔材料的共沉淀法制备及气敏性能研究

Gas Sensing Properties of Mesoporous ITO Doped with Au Prepared by Co-Precipitation

采用共沉淀法制备了掺杂Au的ITO（Sn/In=0.6）介孔材料来制备H2敏感器,分析结果表明,制得的ITO（纯和掺杂样品）是菱形晶相,其中掺杂5 mol%Au的样品有较窄的孔分布,其孔径为7～8 nm,用其制作的元件在150 mA工作电流下对H2（10-3）的灵敏度达到40.6,且对CO,NH3选择性较高。响应时间和恢复时间均小于1 min。

The mesoporous ITO（Sn/In=0.6） doped with Au was prepared through co-precipitation It can be used to make H2 sensor.The ITO（pure and doped） was rhombohedron crystal phase,and the ITO doped with 5 mol%Au had narrow pore distribution,its apertures were about 7-8 nm,and the sensitivity to H2（10-3） reached to 40.6 under 150 mA.and selectivity to CO and NH3 was good.The response and resume time were less than one minute.