Optical and electrical properties of N-doped ZnO and fabrication of thin-film transistors

Using NH3 as nitrogen source gas, N-doped ZnO （ZnO：N） thin films in c-axis orientation were deposited on glass substrates by radio frequency magnetron sputtering at room temperature. The ZnO：N thin films display significant increase of resistivity and decrease of photoluminescence intensity. As-grown ZnO：N material was used as active channel layer and Si3N4 was used as gate insulator to fabricate thin-film transistor. The fabricated devices on glasses demonstrate typical field effect transistor characteristics.