背面曝光技术制作沙漏状X射线组合折射透镜

Hourglass-shaped X-ray compound refractive lens made by back-mask exposure technology

在分析沙漏状X射线组合折射透镜(X-ray compound refractive lens,XCRL)的折射聚焦理论的基础上,设计并利用背面曝光技术制作了SU-8材料的沙漏状XCRL,该技术在保证图形准确性的同时减少了工艺步骤,使制作更加简便易行.在10keV单色X射线辐射下,对制作的透镜进行了聚焦性能的实验测试,结果表明,所制作的透镜较好地实现了一维聚焦.

Using back-mask exposure technology,the hourglass-shaped X-ray compound refractive lens （XCRL） was made. Firstly,the theory of the refractive focusing of the hourglass-shaped XCRL was analyzed. Then the hourglass-shaped XCRL was manufactured using back-mask exposure technology for the first time,which avoids two-time masking and reduces the transfer times of the figure. The refractive focusing performance of the lens was tested with 10？keV monochromatic X-ray. The experimental results indicated that it has good focusing performance in one dimension,which is in general coincident with the calculated results.