一种交叉的切尔尼—特纳型远紫外成像光谱仪

FUV Imaging Spectrometer Based on Crossed Czerny-Turner Structure

本文介绍了远紫外成像光谱仪的需求和若干关键技术,描述了一种光谱范围为100～300nm,光谱分辨率优于1.67nm的远紫外波段成像光谱仪的设计方法和定标实验。该仪器基于交叉的切尔尼—特纳型光谱仪光路结构,采用全反射式系统。根据初级像差理论设计了光学系统,使用Zemax进行了仿真和优化,在紫外—可见光波段对仪器的性能进行实验验证,并进行了光谱定标和成像性能分析。

This article introduced the needs and key technologies of the Far Ultraviolet （FUV） imaging spectrometer. The design method and spectral calibration were researched. The FUV imaging spectrometer was based on crossed Czerny-Tumer optical structure with all reflective components in it. The initial structure was calculated based on the primary aberrations theory, and the optical system whose effective wavelength range is from 100 nm to 300 nm was simulated and optimized by the optical design software Zemax in order to advance the spectral resolution. The crossed Czemy-Turner spectrometer system was set up and the spectral calibration and imaging ability test were achieved. The measured spectral bandwidth is less than 1.67 nm.