TiZrV吸气剂激活过程的XPS分析

X-Ray Photoelectron Spectroscopy Study of Activation of TiZrV Nonevaporable Getters

本文用x射线光电子能谱仪（XPS）对TiZrV合金吸气剂的激活过程进行了监测，研究了吸气剂表面Ti、Zr、V、O、C元素的化学价态随温度的变化。实验结果表明：暴露过大气的TiZrV吸气剂表面的佻、Zr和V主要以氧化态的形态存在。当吸气剂置于高真空激活时，钒的氧化物在较低的温度（250℃-300℃）开始被还原，钛的氧化物在稍高于钒的温度（300℃）也开始被还原，400℃时表面已经有大量的金属钛的存在，而压的氧化物在（100℃～400℃）激活过程中，则没有明显的变化。

The activation of the non-evaporable TiZrV getters was characterized with X-ray photoelectron spectroscopy（XPS）. The impact of temperature on the changes in the chemical bonding states of various elements, including Ti, Zr, V and C on the TiZrV alloy surface,in the activation was studied. The resets show that after exposure to the atmosphere, Ti, Zr and V of the getter exist in the form of oxides. In the ultra high vacuum（UHV） activation, reduction of the vanadium oxide started at a lower temperature（250℃ to 300℃ ）,and the reduction of the titanium oxides started at a higher temperature（300℃ ）.At 400℃ ,large amount of titanium was observed on the getter surfaces. However, as the temperature increases from 100℃ to 400℃ in the activation,no observable changes in zirconium oxides was found.