裸露金属电极大气压射频辉光放电研究进展

Recent Progress of Atmospheric-Pressure Glow Discharges with Bare-Metallic Electrodes

射频大气压辉光放电等离子体在等离子体辅助刻蚀、薄膜沉积、消毒灭菌、空气净化、战地生化清洗等领域有着非常广阔的应用前景。目前,采用具有裸露金属电极结构的等离子体发生器实现大气压条件下氮气、氧气以及空气等廉价气体的稳定射频辉光放电是一项具有挑战性的研究工作。本文以采用诱导气体放电法和局部电场强化法产生纯氮、纯氧及空气的大气压射频辉光放电等离子体以及大气环境下气体流动对等离子体放电特性的影响为重点,综述了裸露金属电极结构的大气压射频辉光放电等离子体电特性实验研究的最新进展。

Radio frequency atmospheric pressure glow discharge （RF APGD） plasma sources have wide applications in different fields, such as plasma-aided etching, deposition, disinfection and sterilization, air purification, decontamination of chemical and/or biological warfare agents. At the present time, it is a challenging task to obtain nitrogen, oxygen or air RF APGDs using the plasma generators with bare metallic electrodes at atmospheric pressure. This paper, reviews the production methods of the RF APGD plasma sources with pure nitrogen, oxygen or air as the plasma-working gas by using an induced gas discharge approach or under an intensified local electric field, and the influences of the plasma-working gas flow rates on the discharge characteristics of the glow discharges at atmosphere, including the recent progress of the experimental studies on the electrical features of the RF APGD plasma sources using bare-metallic electrodes.