摘要
以某微电子工程真空系统为例,对其漏油故障进行分析,并给出检修思路和故障排除方法。
Taking the vacuum system of a microelectronics facility as an example, the cause of oil leakage is analysed and thoughts and methods for trouble-shooting are given.
出处
《洁净与空调技术》
2009年第1期63-65,68,共4页
Contamination Control & Air-Conditioning Technology
关键词
真空系统
旋片式真空泵
真空阀
气镇阀
漏油
Vacuum system
Rotary vane vacuum pump
Vacuum valve
Pneumatic valve
Oil leak
