空气传播分子污染物、源头及监控系统的研究

Study on Source Airborne Molecular Contaminant,and Monitoring System

通过研究某半导体制造工厂应用AMC控制程序的案例,探讨关于AMC控制的具体内容,了解AMC并掌握如何制定正确的AMC评估战略、描述与建立AMC控制原则和规范、理解AMC控制系统的设计理念。

Through the study by a semiconductor manufacturing plant on the application of AMC control procedures for the case, explore the specific details of AMC control, understand to develop a strategic assessment of the AMC, describe and establish norms and principles of control of AMC, and understand the design concept AMC control system.