氮化铝陶瓷基片的传热机理研究

A Study on Thermal Conductivity Mechamism of AlN Ceramic Substrate

用流延成形法制造高热导率氮化铝陶瓷基片．对烧结后的样品进行了性能测试，用扫描电子显微镜、电子探针等实验手段进行了观测，分析了影响烧结样品密度和热导率的因素，提出优化生产工艺．

AlN ceramic substrates with high thermal conductivity were made with flowing forming methods.The characters of sintered samples were tested with SEM(scaning electron microscope),EP(electronprobe)and other instruments.Some influencing factors for density and thermal conductivity of samples were determined.Optimum producing process was also presented in this paper.