摘要
用神经元网络的方法预测了溅射靶材、工艺参数与电阻薄膜性能之间的关系.经预测误差分析以及与实验比较,表明用79组训练样本可基本准确预报电阻薄膜的性能.对各参数影响薄膜性能的程度也作了分析.
A preliminary investigation using neural network is performed on the relationship between target composition, processing and properties of thin film resistor. The neural network is trained using 79 model vectors. It is shown that, by error analysis and comparison with experimental data, the neural network is able to predict the properties of thin film resistor fairly well. Furthermore, the sensitivity analysis of processing variables on the properties of thin film is made based on the prediction from neural network.
出处
《上海交通大学学报》
EI
CAS
CSCD
北大核心
1998年第2期23-26,共4页
Journal of Shanghai Jiaotong University
基金
国家自然科学基金
关键词
神经元网络
靶材
薄膜
neural network
target
thin film