SiC/W 纳米多层膜的微结构和微观力学性能

Microstructure and Micro Mechanics Analysis of SiC/W Nano Laminated Films

用磁控溅射法在硅基底上制备了不同调制波长Λ的ＳｉＣ／Ｗ纳米多层膜，利用小角度衍射技术（ＬＸＤ）研究了各样品子层界面的调制周期性，并用上限为２０ｍＮ的超显微硬度计ＵＭＨＴ－３，对上述纳米薄膜进行了多载荷微观力学性能测试．结果表明：纳米ＳｉＣ／Ｗ调制多层膜的超显微硬度随测试负荷Ｆ和调制波长Λ的改变而变化，在负荷为５ｍＮ时峰值硬度为１９．９ＧＰａ，与均匀混合的纳米薄膜相比，超显微硬度值提高了约１倍，显示出明显的硬度异常效应．结合实验结果对硬度值随调制波长Λ出现的峰值效应作了初步探讨．

SiC/W nano laminated films with various alternative lengths are prepared by a magnetron sputtering system. Using low angle X ray diffraction method, their interface miro structures and alternative periods are studied and the ultramicrohardness tests with loads smaller than 20 mN are performed on the nano laminated films by UMHT 3. It is shown that the UMH values of nano laminated films varies with the applied load F and alternative length Λ . When F =5 mN, the UMH reaches the maximum, 19.9 GPa, about one times higher than that of the homogeneously mixed layes. The anomalous UMH varying with the alternative length is discussed.