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On the origin of dissimilar pore evolution on patterned and unpatterned (100) n-type silicon 被引量:1

On the origin of dissimilar pore evolution on patterned and unpatterned (100) n-type silicon
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摘要 Via systematic investigation of the anodization of both patterned and unpatterned specimens, phenomena of pronounced discrepancy with respect to pore size, pore density and pore etch-rate were evidenced. Based on the detailed analysis of scanning electron microscope (SEM) micrographs and current-voltage curves, the competition between physical and chemical elements was found to be crucial to understanding the observations. The results indicate that the size, density and growth-speed of pores may act as an evident function of the initial morphology of the sample surface, despite a nearly fixed width of the space charge region. Electric-field effect as well as current-burst-model (CBM) was employed to interpret the underlying mechanism. Via systematic investigation of the anodization of both patterned and unpatterned specimens, phe-nomena of pronounced discrepancy with respect to pore size, pore density and pore etch-rate were evidenced. Based on the detailed analysis of scanning electron microscope (SEM) micrographs and current-voltage curves, the competition between physical and chemical elements was found to be cru- cial to understanding the observations. The results indicate that the size, density and growth-speed of pores may act as an evident function of the initial morphology of the sample surface, despite a nearly fixed width of the space charge region. Electric-field effect as well as current-burst-model (CBM) was employed to interpret the underlying mechanism.
出处 《Chinese Science Bulletin》 SCIE EI CAS 2009年第7期1143-1151,共9页
基金 Supported by the Hi-Tech Research and Development Program of China (Grant No. 2006AA04Z312) National Basic Research Program of China (Grant No. 2006CB300403)
关键词 孔隙演化 扫描电子显微镜 起源 空间电荷区 阳极氧化 系统调查 苯丙氨酸 电压曲线 electrochemistry, surface morphology, patterned and unpatterned specimen, physical and chemical factor, I-V (current-voltage)curve
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参考文献12

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同被引文献6

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