计量型原子力显微镜

A Metrological Atomic Force MicroscopeM. Bienias, K. Hasche, R. Seemann, K. Thiele

本文报导国际上研制的第一台在纳米测量中，在中等测量范围内，具有微型光纤传导激光干涉三维测量系统、可自校准和进行绝对测量的计量型原子力显微镜。它的诞生，可使目前用于纳米技术研究的扫描隧道显微镜定量化，并将其所测量的纳米量值直接与米定义相衔接。使人们更加准确地了解纳米范围内的各种物理现象，并对它们进行更精确的分析。文章对计量型原子力显微镜进行了理论分析，提出了对各种测量误差的抑制及其补偿方法，并进行了大量的实验，得到良好的结果。目前，该计量型原子力显微镜在其测量范围内，任意两点间距离的测量不确定度为Ｕ９５＝５ｎｍ＋２×１０－４ｌ；在ｚ－轴上的测量不确定度为Ｕ９５＝（１．１～１．２ｎｍ）＋２×１０－４ｈ。

狝 metrological atomic force microscope (MAFM) firstly has been developed in the world. As this MAFM is self-calibrated and quantized with a 3-D miniature-size laser interferometer system (laser beam is transmitted by an optical fibre from the laser to the interferometer) in the middle-sized measuring range of the nanometer measurement, the results of the MAFM will be directly traced to meter definition. Same results are also faced on scanning tunnel microscope (STM) in the field of nanometer technique and measurement. The quantized MAFM and MSTM will contribute exact explain and analysis to nanometer surface physics. The theoretic analysis for using the AFM as a metrological instrument, the eliminating and complementary methods of the instrument errors, and the experiments and the results are published in the paper. The measurement uncertainty of the MAFM is U95=5nm+2×10-4l (l——the measured length between two arbitrary points in the measurement range in μm); The measurement uncertainty along z axis is U95=(1.1～1.2nm)+2×10-4h(h——the measured height in μm).