4阶二元光学元件制作误差的解析分析

Fabrication Error Analysis of 4-step Binary Optic Elements

根据标量衍射理论,提出了4阶二元光学元件制作误差对衍射效率影响的解析表达式,对此解析公式展开了讨论,并与计算机模拟结果进行了比较,两者吻合得很好,且与实验结果基本符合。

In this paper, an analytic formula is given to show the relationship between the diffractive efficiency and fabrication error of 4- step binary optic elements by using the scalar diffractive theory. The formula has been disscussed in some situations and compared with the results of simulation complished by us before. The results of the two methods agree well. The finding may play a role in guiding the fabrication of binary optic elements.