大尺寸几何量检测的光电系统研究

The study on the photoelectric system of lage dimentionsgeometric measurement inspection

用ＣＣＤ测外径、厚度、宽度等几何量具有自扫描、高分辨率、高精度、非接触和稳定性好等一系列优点。本文就使用ＣＣＤ对大尺寸几何量的测量进行了深入的探讨，提出了分裂式结构及双路分光的光学系统，给出了简单的计算公式，对利用Ｈｅ－Ｎｅ激光作为ＣＣＤ光源也进行了分析。

CCD is used as sensor to measure diameter,thickness,width and other geometric dimensions.This measuring system has a series of advantages such as selfscaning,high resolving power,high precision.noncontact and good stabililty.Measuring theory about large geometric sizes has been studied in details and presented in this paper.A march past structure,an optical system in which the light beam is divided into two,and some simple calculating formulas are the advantages of this system.Considering of its spectrum,HeNe laser is the best light source to CCD.