光激励微型硅谐振器研究

The Research on Optically Excited Silicon Resonators

本文介绍了一种可以形成新型光纤传感器的微型硅谐振器，其基本原理是微型硅谐振器在调制光的光热作用下产生谐振，被测物理参数使谐振频率发生改变．文中给出了用单晶硅制作桥型微谐振器的方法，研究了微型谐振器在光激励下产生振动的机理．

This paper describes a silicon microresonator with which a new class of fiberoptic sensors can be formed. The basic principle is that the measured value changs the resonance frequency of the microresonater.The flexural vibrations of the microresonator are excited photothermally under the action of modulated optical radiation. The fabrication of microbridge-type resonators made of single-crystal silicon is presented. The mechanism by which microresonators are optically activated is identified and discussed.