聚焦离子束系统中图形发生及自动套准系统的研究

Research of Graphics Generation and Auto-Alignment System for Focused-Ion-Beam

本文描述了一种用于聚焦离子束系统的图形发生器和自动套准系统的研究和实现，并探讨了发展和改进的方向．该系统采用硬件实现扫描控制和坐标变换．在我们的实验条件下，实现了单场扫描2秒钟，套准计算4秒钟．该系统同样也适用于电子束曝光机系统。

A graphics generation and auto-alignment system for the focused-ion-beam is described. The development and improvement of the system are also discussed. The feature of the system is using hardware to achieve the scan control and coordinate conversion. Under our experiment condition, scanning one frame takes 2 seconds, an alignment calculation takes 4 seconds. This system is also suitable for the electron beam lithography system.