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射频感性耦合等离子体中的受迫振荡研究 被引量：1

The study of driven oscillation in inductively coupled plasma
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摘要 实验研究了匹配状态、放电气压对氩气射频感性耦合等离子体中受迫振荡的影响。结果表明:受迫振荡总是出现在放电的正反馈区;在高气压下(>30Pa)受迫振荡的频率较低。对于使用射频感性耦合等离子体进行薄膜沉积的参数选择给予了理论指导。 A low - frequency oscillation - driven oscillation in ICP by Ar discharging is found near mode transition. The oscillation＇s region and cause are studied in the experiment, and the influence of pressure is also measured. It is found that driven oscillation occurs in the positive feedback region which is established basing on the influencing of stray capacitor in impedance matching work to the output power of radio - frequency power supply. As the changing of pressure, at high pressure（ 〉 30Pa） the frequency of driven oscillation is small. The steady parameters of depositing film in ICP are discussed in theory.
作者 孙景超 丁振峰
机构地区 沈阳航空工业学院理学院 大连理工大学三束实验室
出处 《沈阳航空工业学院学报》 2009年第1期79-84,共6页 Journal of Shenyang Institute of Aeronautical Engineering
关键词 射频感性耦合等离子体 受迫振荡 模式转化 ICP mode transition driven oscillation
分类号 O531 [理学—等离子体物理]
  • 相关文献

参考文献15

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二级参考文献11

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同被引文献11

  • 1庄钊文等.等离子体隐身技术[M]科学出版社,2005.
  • 2黄培康,殷红成,许小剑.雷达目标特性[M]电子工业出版社,2005.
  • 3袁敬闳,莫怀德.等离子体中的波[M]电子科技大学出版社,1990.
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  • 6J. P. V. Hof,D. D. Stancil.Eigenfrequencies of a Truncated Conical Resonator via the Classical and Wentzel-Kramers-Brillouin Methods. IEEE Transactions on Microwave Theory and Techniques . 2008
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  • 8Hu B J,Wei G,Lai S L.SMManalysis of reflection,ab-sorption and transmission from nonuniform magnetizedplasma slab. IEEE Trans on Plasma Sci . 1999
  • 9李毅,张伟军,莫锦军,袁乃昌.闭式等离子体隐身技术及等离子体参数的优化[J].微波学报,2008,24(1):23-25. 被引量：20
  • 10方弘毅,李光里,杨波.等离子体控制翼型流动分离实验[J].沈阳航空工业学院学报,2010,27(4):18-22. 被引量：3

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二级引证文献4

沈阳航空工业学院学报
2009年 第1期

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