光纤连接器端面的显微干涉测试系统

A Testing System for Optical Fiber Connector End Surface Based on Microscopic Interferometry

介绍了一种基于显微干涉的光纤连接器端面的测试系统,干涉仪由Mirau干涉物镜和镜筒透镜组成,CCD相机采集干涉图样,经处理后得到相位分布图.采用Carre相位提取算法,无需进行特定步长的相移.对光纤连接器端面的表面形貌、曲率半径、顶点偏移进行测量,测量系统的横向分辨率可达到0.9μm,重复性测量精度为9.5 nm.

This paper introduces a testing system for optical fiber connector end surface based on microscopic interferometry. The interferometer consists of a Mirau interference objective and a tube lens. A CCD camera captures the interferograms to get the phase distribution. The carre algorithm is adopted to extract algorithm, so the determinate step size of phase-stepping method is unnecessary. This method can obtain geometrical parameters of the optical fiber connector end surface such as surface topography, radius of curvature and apex displacement. The result shows that the lateral resolution is 0. 9 μm and the vertical repeatability is 9. 5 nm of the measurement system.