摘要
简单介绍了辉光放电质谱(GDMS)的基本原理。对辉光放电质谱在块状金属、半导体、非导体、溶液、气体和深度分析方面的应用进行了综述。块状金属和半导体的痕量元素分析为GDMS主要的应用,它们的研究报道众多;对非导体材料的分析扩宽了GDMS的应用范围;同时尝试采用GDMS对溶液和气体样品进行分析;GDMS作为一种重要的深度分析方法,相关的应用迅速增加。最后展望了辉光放电质谱的发展趋势。
The basic principle of glow discharge mass spectrometry （GDMS） was briefly introduced. The application of GDMS was reviewed in the aspects of the bulk metal, semiconductor, nonconductor, solution, gas and depth analysis. Trace elements analysis of bulk metal and semiconductor is the main application of GDMS, and their research reports are numerous. Nonconductor analysis enlarges the application domain of GDMS. Meanwhile, the solution and gas samples have been analyzed tentatively by using GDMS. As an important depth analysis method, the correlative applications of GDMS are increasing quickly. Finally, the trend in development of GDMS was expected.
出处
《冶金分析》
CAS
CSCD
北大核心
2009年第3期28-36,共9页
Metallurgical Analysis
基金
科技部新技术新方法项目(2003-34)
关键词
辉光放电质谱
应用
进展
glow discharge mass spectrometry
application
development
