基于微带环缝谐振器的小功率微波等离子体源

Study on Low-Power Microwave Plasma Source Based on Microstrip Split-Ring Resonator

介绍了一种基于微带环缝谐振器的2.45 GHz小功率微波等离子体源,根据微带环缝谐振器的奇模等效电路,通过S参数与微波等离子体阻抗之间的关系,研究小功率微波等离子体源的阻抗匹配及其在不同气体条件下的放电规律.研究表明,在低气压(空气)和常压(氩气)条件下,输入功率不超过1 W,都能使气体放电并激励起稳定的微波等离子体;当微波等离子体激励以后,小功率微波等离子体源的谐振频率和S参数发生变化.这些为小功率电容耦合微波等离子体源的小型化研究提供了理论基础.

A low-power microwave plasma source based on microstrip split-ring resonator at 2.45 GHz was presented. The impedance matching of low power microwave plasma source was analyzed based on odd mode equivalent circuit and the interrelation between S parameter and microwave plasma impedance, and the discharges in various gas pressure were studied. The research shows that air plasma is ignited in low pressure and Ar plasma is ignited in atmospheric pressure as the input power is less than 1 W. The resonant frequency and S parameter of low power microwave plasma source change with the excitation of microwave plasma. This may be a theoretical guidance for miniaturization of capacitively-coupled microwave plasma source.