摘要
从质量块结构和梁结构2个方面进行分析,指出了定齿偏置质量块结构和折叠梁的梳齿式微机械加速度计的综合性能最好,并通过分析计算出了折叠梁在检测方向的刚度,为电容式惯性传感器进一步优化设计奠定了坚实的理论基础。
This paper analysis both mass block construction and the beam structure, presents that the best structure is folded beams and bias stationary structure of finger-shaped on variable-capacitance inertial sensor. Finally, its measure rigidity is figured out by analysis. This work will provide a theoretic foundation for the further optimum design of variable-capacitance inertial sensor.
出处
《武汉理工大学学报》
CAS
CSCD
北大核心
2009年第6期142-145,共4页
Journal of Wuhan University of Technology
关键词
电容式惯性传感器
质量块
结构梁
定齿偏置梳齿结构
刚度
variable-capacitance inertial sensor
mass block
structure beam
bias stationary of finger-shaped structure
rigidity.
