飞秒激光和酸刻蚀方法制作凹面微透镜阵列

Concave Microlens Arrays Produced by Femtosecond Laser With HF Acid Etching

基于飞秒激光光刻技术和氢氟酸对光学玻璃的刻蚀,在K9光学玻璃表面制作了凹面微透镜阵列,并且可以以此为模板实现凸微透镜阵列的大量复制.用相位对比显微镜和扫描电子显微镜分析了微透镜阵列的表面轮廓,测试了微透镜阵列的光学衍射特征.该方法简单、透镜参量可控,制作的微透镜阵列能够用于分光、光束匀化、并行光刻等强激光领域.

The concave microlens arrays were fabricated on K9 optical glasses using the technology of femtosecond laser and hydrofluoric acid etching on the surface of optical glass. This concave MLA as mold can achieve lots of convex MLAs by replication. The surface micromorphology and optical diffraction characteristics of the concave microlens array were analyzed respectively by the phase contrast electronic microscope and the scanning electron microscope. The process was parameter-controllable and implemented simply. Those concave microlens arrays can be applied to the field of light splitting, beam smoothing and parallel photolithography etc.