基于变质层的Al_2O_3陶瓷激光铣削试验研究

An experimental study of laser milling based on deteriorative layer on Al_2O_3 ceramic

介绍一种基于变质层控制的氧化铝陶瓷激光铣削方法．在无辅助气体条件下，激光扫描照射陶瓷表面，产生一变质层，对变质层的性质和尺寸进行控制，达到激光铣削Al2O3陶瓷材料的目的；同时，对变质层进行晶相组织分析，指导对激光铣削参数的选择。形成陶瓷材料的激光铣削工艺．试验研究了变质层的形成和脱落机理，分析了激光铣削工艺参数对铣削深度和铣削表面质量的影响规律．利用优化的铣削工艺对Al2O3陶瓷进行了激光多层铣削试验，得到各单层铣削深度为0．35～0．50mm、各层表面粗糙度为2．0～3．2μm的激光铣削效果．试验结果可为Al2O3陶瓷激光铣削提供理论依据与应用指导．

A new method using laser milling of Al2O3 ceramic based on controlling deteriorative layer is presented in which the process does not use any assistant gas. Using laser to radiate ceramic surface to form deteriorative layer directly, and by using the method of analyzing the type of crystal phases of the deteriorative layer to select laser milling parameters, a new laser milling technology is developed.The mechanism of the formation and falling-off of the deteriorative layer is investigated. Milling depth and milling surface quality with different milling parameters are studied systematically, and experiments of multi-layers laser milling are also researched with optimized processes on Al2O3 ceramic. A steady result for every layer is 0.35-0.50 mm of milling depth and 2.0-3.2 μm of surface roughness . The experimental study has provided deeper understanding of laser milling Al2O3 ceramic technology both in theory and application.