摘要
采用自组装单层膜技术,以三氯十八烷基硅烷(octadecyl-trichloro-silane,OTS)为模版,在玻璃基片上成功制备了钛酸锶晶态薄膜。改性基板的亲水性测定与金相显微镜测试表明,紫外光照射使基板由疏水转变为亲水,OTS单分子膜对薄膜的沉积具有诱导作用;X射线衍射(XRD)与扫描电镜(SEM)表征显示,制备成功的钛酸锶薄膜结晶良好,样品表面均匀,在垂直基板表面方向上呈花状生长;EDS能谱测试为钛酸锶薄膜的化学组成提供了有力的证据;同时探讨了自组装单层膜和钛酸锶薄膜的形成机理。
OTS as stencil, SrTiO3 thin film was successfully prepared on glass wafers with self-assembled monolayers technique. Hydrophilic characteristic measuration of glass wafers and photographs of metallographic microscope indicated that the hydrophobe substrate changed into hydrophile by UV iradiation, and an induction of deposition SrTiO3 thin film by OTS-SAM. XRD and SEM results show that successfully prepared SrTiO3 thin film with wellcrystalline and homogeneous. The prepared SrTiO3 thin film with flower-like morphology was growth vertical on the glass substrate. EDS spectrum test provided strong evidence for the chemical composition of strontium titanate thin film. The formation mechanism of OTS-SAM and SrTiO3 thin film was carefully discussed.
出处
《无机化学学报》
SCIE
CAS
CSCD
北大核心
2009年第3期517-521,共5页
Chinese Journal of Inorganic Chemistry
基金
国家自然科学基金(No.50672055
50872077)
国家科技支撑计划(No.2006BAF02A28)
陕西科技大学研究生创新基金资助项目
关键词
自组装单层膜
钛酸锶
薄膜
形成机理
self-assembled monolayer
SrWiO3
thin film
formation mechanism
