溶胶-凝胶法制备ZnO薄膜的晶粒定向生长与光学性质

Grain-growth orientation and optical properties for ZnO film by sol-gel method

采用溶胶-凝胶法在普通化玻片上制备出高C轴择优取向的ZnO薄膜,深入研究了溶胶浓度、甩膜层数、退火温度对薄膜相结构、晶粒定向生长和紫外光吸收与可见光透射特性的影响。实验发现,在300-600℃退火范围之内,随着退火温度的升高,薄膜晶粒生长取向性增强,晶粒尺寸增大;用Zn含量为0.5mol/L的溶胶使用旋涂法甩膜和经过预热处理的5层膜再经过550℃退火1h后所形成的薄膜晶粒沿C轴高度择优取向,结构系数Tc（002）达到5.1,该薄膜的平均透射率为90%。

Grain-growth C-axis highly oriented zinc oxide thin films on glass substrates were prepared by sol-gel spin coating technique. And the influence of solution concentration, number of layer coated wavelength, heat treatment temperature on structure, grain-growth orientation and light absorption in UV wavelength range and light transmission in visible wavelength range of ZnO thin films were discussed in details. It was shown that C-axis grain-growth orientation was enhanced and grain size get bigger with the increase of heat treatment temperature between 300 to 600℃. Tc（002）and the average light transmittance for 550℃ annealed ZnO film with 5-layer-coated, derived from a solution containing 0. 5mol/L of Zn, was 5.1 and 90% respectively.