气囊抛光工艺参数的正交实验分析

Orthogonal experiment and analysis on polishing parameters of bonnet polishing

针对平面光学零件,以抛光去除率和表面粗糙度为考核指标,应用正交试验法分析了气囊抛光过程中的主要工艺参数,包括抛光工具气囊的压缩量、气囊转速、气囊内部充气压力、抛光液的浓度对抛光去除效率和表面粗糙度的影响规律。结合气囊抛光的抛光机理对其进行了分析,根据实验结果对工艺参数进行了优化,并进行了综合参数的气囊抛光加工实验,获得了超精密光滑的表面。

For the plane optical work-pieces, the influence to the removal efficiency and surface roughness by the processing parameters, such as the bonnet decrement, rotational speed of the bonnet, puffed pressure, concentration of polishing fluid and the work＇s radius of curvature is discussed and analyzed according to bonnet polishing mechanism and material removal mechanism. Synthesized with the fore-parameters, the optimized technological parameter for bonnet polishing optical glass is got. By the experiments integrated process parameters, it is shown that the ultra-precision surface texture can be obtained by the bonnet polishing method. This research establishes the foundation for bonnet polishing technology in optical machining field.