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蠕动式压电直线驱动器的发展及应用 被引量：3

Development and Application of Inchworm-Type Piezoelectric Linear Actuator
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摘要 综述了国内外尺蠖驱动器的发展及其研究现状,列举了一些典型例子,总结了尺蠖驱动器的应用领域。针对现在的尺蠖驱动器在设计、材料、控制等方面存在的问题,指出了在其研究开发中需要解决的关键技术。 The present situation of the research and development of piezoelectric inchworm actuator was introduced, and some typical examples were given. The domains of application of piezoelectric inchworm actuator were described. In the end, the problems and key techniques of piezoelectric inchworm actuator on aspects of design, materials and control etc. were pointed out in this paper.
作者 张兆成 胡泓
机构地区 哈尔滨工业大学
出处 《微特电机》 北大核心 2009年第3期56-59,共4页 Small & Special Electrical Machines
关键词 尺蠖驱动器 直线驱动器 箝位机构 压电叠堆 inchworm actuator linear actuator clamping mechanism piezoelectric stack actuator
分类号 TM38 [电气工程—电机]
  • 相关文献

参考文献21

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共引文献170

同被引文献31

  • 1赵宏伟,吴博达,华顺明,杨志刚,程光明,曲兴田.尺蠖型压电直线驱动器的动态特性[J].光学精密工程,2007,15(6):873-877. 被引量：5
  • 2Yeh R, Hollar S, Pister K S J. Single Mask, Large Force,and Large Displacement Electrostatic Linear Inchworm Motor[J].Microelectromechanical Sys- tems, 2002,11 (4) : 330-336.
  • 3Ni Jun, Zhu Zhenqi. Design of a Linear Piezo-mo- tor with Ultra-high Stiffness and Nanoprecision [J]. IEEE/ASME Transactions on Mechatronics, 2000,5(4) : 441-443.
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  • 9Zhang Bi,Zhu Zhenqi. Development a Linear Piezo- motor with Nanometer Resolution and High Stiff- ness[J]. IEEE/ASME Transaction on Mechatron- ics, 1997,2(1) :22-29.
  • 10Moon C, Lee S, A New Fast Inch-worm Type Acutator with the Robust I/Q Heter-odyne Inter- ferometer Feedback [J ]. Mechatronics, 2006, 16 : 105-110.

引证文献3

二级引证文献8

微特电机
2009年 第3期

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