不同后处理方法对溶胶-凝胶SiO_2膜层抗污染能力的影响

Effects of different treatments on contamination resistant capability of sol-gel SiO_2 film

以正硅酸乙酯作为前驱体,利用碱催化方式制备了SiO2溶胶,采用提拉法在K9基片上镀制SiO2单层薄膜,分别用热处理、紫外辐射处理、氨水加六甲基二硅胺烷气氛处理和酸碱复合膜4种后处理法对膜层进行处理,采用分光光度计、红外光谱、扫描探针显微镜、静滴接触角测量仪、椭偏仪等分析了薄膜的特性,通过真空环境加速污染实验对处理前后的膜层进行抗污染能力对比,结果表明:在碱性SiO2膜层上加镀一层酸性SiO2膜的复合膜层整体透过率仍保持在99%以上,疏水角达到128°,膜层真空抗污染能力大大加强。

The preparation of SiO2 colloids by alkali-catalyze method was reported . The single film of SiO2 was prepared by dip coating method on K9 glass. After the films being treated in different ways, including heat, UV irradiation, ammonia and hexamethyl disilazane, and acid film coating treatments, the properties of the films were analyzed by spectrophotometry, Fourier transform infrared spectroscopy, scanning probe microscope, contact angle measuring apparatus and spectroscopic ellipsometer, et al. The contamination resist capabilities of the single film before and after accelerated contamination in vacuum were compared. The results indicate that the transmittance of the complex film with an acid film is still above 99%, and the water contact angle is 128°, the contamination resistant capability in vacuum is great improved.