真空紫外到深紫外波段基底材料的光学特性

Optical properties of vacuum ultraviolet and deep ultraviolet region substrate materials

研究了真空紫外到深紫外波段常用的基底材料，给出了常用基底材料的光学特性和在真空紫外波段的截止波长，测量了这些材料在120～500nm的透过率，给出了通过透过率计算弱吸收基底光学常数的计算方法，并用该方法得到了熔石英、氟化镁晶体、氟化钙晶体、氟化锂晶体在120～500nm的折射率和消光系数，对这些常用基底的使用范围和特点进行了一定的比较和分析，并将所得基底的光学常数与公开发表的文献进行了比较，证明了所得结果的可靠性。

To furnish a greater choice of substrate materials for application in vacuum ultraviolet and deep ultraviolet region, the optical properties of several substrate materials such as JGS1, MgF2, CaF2, and LiF are studied in the wavelength region from 120 nm to 300 nm. The optical constants of these materials are determined from photometric measurements through a process of matching calculated and measured values of the reflectance and transmittance in the ultraviolet to deep ultraviolet region. A method to calculate optical properties of weak absorption substrates is introduced.