摘要
给出了圆筒形微空心阴极氦气放电的三维、时域、自恰流体方程组(粒子连续性方程、电子能量平衡方程和泊松方程)及其稳态的差分方程组和合理的边界条件,并利用计算机模拟计算,得出了放电稳态时形成的粒子密度、电子平均能量、电位等值线和电场分布图。结果表明在放电过程中存在明显的阴极位降区和负辉区,空心阴极效应明显,存在高能电子以及放电空间中以径向电场为主。并对计算结果进行讨论,为微空心阴极放电器件提供了理论依据。
A three-dimensional, time-dependent, and self-consistent fluid model is developed to simulate the helium plasma in a cylindrical microhollow cathode （MHCD） with reasonable boundary conditions. The particle density, electric potential, electron energy, and the distribution of the electric field are calculated. The results show that there exist the cathode dark space region and negative glow region, and the hollow cathode effect is in evidence. The results presented in this paper provide an understanding of the basic mechanisms governing the MHCD devices.
出处
《电子科技大学学报》
EI
CAS
CSCD
北大核心
2009年第2期236-239,共4页
Journal of University of Electronic Science and Technology of China
基金
国家自然科学基金(60571018)
关键词
边界条件
计算机模拟
流体模型
微空心阴极
boundary condition
computer simulation
fluid model
microhollow cathode
