纳米多孔氧化铝膜的制备

Preparation of Alumina Nanoporous Film by Anodic Oxidation

以草酸为电解液,采用二次阳极氧化法于室温下制备了多孔阳极氧化铝膜,研究了电解液浓度和试样退火处理对膜表面形貌的影响。利用扫描电镜(SEM)对其表面形貌进行表征,并对其微观形貌进行分析。结果表明,草酸浓度在0.2～0.4 mol/L范围内所制备的样品结构符合Keller结构模型,孔洞均匀分布于氧化铝膜表面,纳米孔阵列呈高度有序、紧密堆积的排列,孔径大小一致,约为86 nm,退火处理对膜的形貌没有明显影响。

Ordered alumina nanoporous film was prepared by two-step anod-ic oxidation in oxalic acid electrolyte at room temperature. The morphology and microstructure of the film were analyzed by means of scanning electron microscopy, and the effects of electrolyte concentration and annealing treatment on the appearance and mi-crostructure of the film were investigated. It was found that the a-lumina film prepared at an electrolyte concentration of 0.2 ~0. 4 mol/L had structure conforming to Keller structural model, and it had holes uniformly distributed on the surface. The nanopore ar-rays were highly ordered and closely stacked, and the pore diam-eter in a narrow distribution was approximately 86 nm. Moreover, annealing treatment had little on the appearance and micro-structure of the anodic oxidation film.