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TiZrV吸气剂的制备及吸气性能研究 被引量：4

Preparation of TiZrV Getter and Its Sorption Characteristics
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摘要 采用粉末冶金的方法制备了TiZrV合金吸气剂,研究了烧结温度、激活温度和激活保温时间对吸气剂性能的影响。采用XRD测定TiZrV合金的相结构,用SEM观察烧结型TiZrV吸气剂的表面形貌,用EDS分析其表面的成分,用定压法吸气性能测试台测试其吸气性能。结果表明,TiZrV吸气剂的最佳激活温度为400℃,最佳烧结温度为700℃。 The TiZrV alloy for getter was fabricated by powder metallurgy, and the effect of the sintered temperature, activated temperature and holding time of activation on sorption property was studied. XRD, SEM and EDS were utilized to analyze the microstructure and composition of TiZrV sample. The hydrogen sorption characteristics of TiZrV was investigated. The result indicated that the best sintered temperature is 700 ℃ and the best activation temperature is 400 ℃.
作者 褚永俊 熊玉华 杜军 尉秀英 秦光荣
机构地区 北京有色金属研究总院先进电子材料研究所
出处 《稀有金属》 EI CAS CSCD 北大核心 2009年第1期39-42,共4页 Chinese Journal of Rare Metals
关键词 TIZRV 吸气剂 激活温度 吸气性能 TiZrV getter activation temperature sorption property
分类号 TB741 [一般工业技术—材料科学与工程]
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参考文献9

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  • 2庄寿全.现代吸气剂及其应用技术[J].真空电子技术,1994,7(5):42-49. 被引量：13
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稀有金属
2009年 第1期

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