PVD TiN涂层力学性能的测试方法

MEASUREMENT FOR THE MECHANICAL PROPERTIES OF PVD TiN COATING

至今一种试样只能测试一到两个涂层性能参数,尚未得到一种切实可行、简单有效、物理意义明确的涂层力学性能的评价方法。文中通过对传统的复合板模型进行改进,提出一种能同时测试涂层多个力学性能参数的方法。利用应变仪、光学显微镜及拉伸机的有效组合,对W6Mo5Cr4V2钢PVD(physical vapor deposition,离子镀)涂覆TiN涂层的板状拉伸试样进行试验,得到TiN涂层的弹性模量、泊松比、剪切模量和断裂强度。弹性常数与文献报道基本吻合,而断裂强度差别较大,并分析差别的可能原因。

By far, only one or two coating mechanical properties can be determined by one kind of specimen, there is not an effective and simple method that can measure multiple mechanical properties of the coating simultaneously. A new method was developed to measure the mechanical properties of TiN coating once through improving traditional composite model. Combining several strain gauges and an optical microscopy with a tensile machine, the candigate material PVD （physical vapor deposition） TiN coating on W6MoSCr4V2 was evaluated to study the feasibility and reliability of the present method. Elastic mednlus, Poisson＇ s ratio, Shear modulus, and fracture strength of the TiN film were obtained simultaneously. The results of elastic constants of the film were in good agreement with the values reported in literatures, whereas fracture strength was lower than the values reported in literatures, and the reasons were also discussed.