摘要
热残余应力对微机械加工制备的压力传感元件的非线性有重要影响。通过测量晶片曲率计算残余应力、有限元分析以及实验对照等方法,为解决氮化硅的残余应力和膜片厚度引起压力非线性问题建立了一个优化设计的窗口。
Thermal residual stress plays a significant role in the performance of micro-electromechanical system pressure sen- sor devices. The curvatures of wafers were measured and the film residual stresses were calculated, and finite element analysis were conducted and correlated with the PNL experimental tests. This paper presented an optimization window for nonlinearity problems.
出处
《仪表技术与传感器》
CSCD
北大核心
2009年第3期98-99,共2页
Instrument Technique and Sensor
关键词
压力传感元件
压力非线性
残余应力
pressure sensor
pressure nonlinearity
residual stress
