摘要
G3600图形发生器采用光栅曝光,只能识别矩形或旋转的矩形。然而,Cadence软件中的Virtuoso版图工具未提供将不规则图形转换为矩形的功能,需要借助Skill语言在Cadence的Virtuoso版图工具上对版图数据进行二次开发。文章以圆为例,列举了Skill版图处理程序的思路和构成。
As Pattern Generator G3600 uses a raster for exposure,it can only recognize rectangle or revolving rectangles. Virtuoso layout tool in Cadence, however, has no function of converting irregular pattern into rectangle. Therefore, it is necessary to do re-development of layout processing data on Virtuoso layout tool in Cadence software by using Skill language. In this paper, the conception and composition of the Skill-based layout processing program are presented,taking a circle for example.
出处
《微电子学》
CAS
CSCD
北大核心
2009年第2期256-258,共3页
Microelectronics
