摘要
为了教师和学生们能够更加顺利地完成真空镀膜实验并且维护好实验设备,本文主要通过真空镀膜原理及构造的角度,论述了真空镀膜机的具体维护。
The article discusses the specific maintenance of vacuum coating machine from the respects of its structure and principle, by which teachers and students can maintain the equipment nicely while they are doing the experiment.
出处
《阴山学刊（自然科学版）》
2007年第4期44-46,共3页
Yinshan Academic Journal(Natural Science Edition)
关键词
真空度
镀膜
vacuum degree
vacuum deposition
