一种新型信号读取图形制作方法的研究

Study on Fabrication of Signal-obtaining Pattern for a Type of Gyroscope

介绍了用于新型陀螺仪上一种转子顶部刻线的光学信号读取系统,讨论了利用光刻技术制作信号读取图形的方法,并给出图形制作结果。结果表明,该方法可用于新型陀螺仪信号读取图形的制作并能提高图形制作的精度。

An optical signal-obtaining system with the pattern engraved on top of rotor for a type of gyroscope is discussed.The fabrication process of signal-obtaining pattern using lithography technology is studied,and the fabrication results of signal-obtaining pattern are given.The results show that it is feasible to fabricate signal-obtaining pattern for a type of gyroscope by the fabrication process which can improve the fabrication precision of the pattern.